Fabrication of nanoscale bioarrays for the study of cytoskeletal protein binding interactions using nanoimprint lithography

M. Schvartzman, K. Nguyen, M. Palma, J. Abramson, J. Sable, J. Hone, Michael Sheetz, S. J. Wind

Research output: Contribution to journalArticle

16 Scopus citations

Abstract

The authors describe a high-throughput patterning process used to create arrays of molecular-scale features for the study of cytoskeletal protein binding interactions. The process uses a shadow-evaporated metal mask to facilitate lift-off of features defined by nanoimprint lithography. This simple and robust approach alleviates difficulties in pattern transfer of ultrasmall features and results in arrays of highly ordered sub-10 nm features which are then functionalized with extracellular matrix proteins. Application of these arrays is demonstrated in cell spreading assays.

Original languageEnglish (US)
Pages (from-to)61-65
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume27
Issue number1
DOIs
StatePublished - Feb 17 2009
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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