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High-throughput top-down fabrication of uniform magnetic particles
Julia Litvinov
, Azeem Nasrullah
, Timothy Sherlock
, Yi Ju Wang
, Paul Ruchhoeft
, Richard C. Willson
Research output
:
Contribution to journal
›
Article
›
peer-review
6
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Scopus citations
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Keyphrases
High-throughput
100%
Magnetic Particles
100%
Top-down Fabrication
100%
Magnetic Properties
100%
Uniform Magnetic
100%
Permalloy
66%
Stencil Mask
66%
Magnetic Field
33%
Broad Beam
33%
Orientation Dependence
33%
Large Array
33%
Thermal Evaporation
33%
Ion Beam
33%
Beam Aperture
33%
Sputter Deposition
33%
Repetitive Patterns
33%
Electron Beam Lithography
33%
Helium Ions
33%
Metal Mesh
33%
Mesh Size
33%
Particle Creation
33%
Alternating Layers
33%
Aperture Array
33%
Circular Opening
33%
Micron-scale
33%
Lithography
33%
Magnetization Direction
33%
Beamlet
33%
Vibrating Sample Magnetometry
33%
Stencil
33%
Engineering
Magnetic Field
100%
Energetics
100%
Lithography
100%
Electron Optical Lithography
100%
Mesh Size
100%
Metal Mesh
100%
Vibrating sample magnetometry
100%
Material Science
Magnetic Property
100%
Magnetic Particle
100%
Permalloy
66%
Lithography
66%
Sputter Deposition
33%
Helium
33%
Physics
Magnetic Property
100%
Lithography
66%
Magnetic Field
33%
Energetics
33%
Thermal Evaporation
33%
Electron Beam
33%
Ion Beam
33%
Magnetic Measurement
33%
Helium Ion
33%
Earth and Planetary Sciences
Magnetic Property
100%
Thermal Evaporation
33%
Ion Beam
33%
Electron Beam
33%
Helium Ion
33%
Mesh Size
33%
Magnetic Measurement
33%